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ASTEL / SemiSyn

Automatic microscope wafer loaders · Official manufacturer resources

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Explore the ASTEL / SemiSyn SIL8600 automatic microscope wafer loader and MIL8000 micro and macro inspection loader. Auckland Scientific is an authorised UK reseller, offering technical guidance and quotation-based solutions for semiconductor wafer inspection.

4–8 inch wafersAutomated wafer handlingMicroscope integrationPrice on Request

Choose your wafer loader

ASTEL SIL automatic semiconductor wafer loader with touchscreen, wafer cassette and handling arm
Automatic microscope loading

SIL8600

Compact automated loading and unloading for microscope-based wafer inspection. Designed to minimise direct wafer handling and support efficient inspection workflows.

  • Laser cassette mapping and wafer-position checks
  • Cross-slot and protrusion detection
  • Carbon-fibre end effector
  • Up to 400 wafers/hour (manufacturer specification)
  • Optional bright-light inspection and rotating chuck
Official SIL8600 technical page
ASTEL MIL wafer loader integrated with microscope for semiconductor wafer inspection
Micro + front/back macro inspection

MIL8000

Automated microscope loading with additional wafer frontside and backside macro inspection, including contactless Bernoulli backside handling.

  • Green LED frontside macro inspection
  • Contactless Bernoulli backside inspection
  • Laser cassette mapping and safety checks
  • Up to 200 wafers/hour (manufacturer specification)
  • Optional SECS/GEM factory interface
Official MIL8000 technical page

At-a-glance comparison

Manufacturer specificationSIL8600MIL8000
Primary purposeAutomatic microscope wafer loadingAutomatic loading plus front/back macro inspection
Wafer sizes4, 5, 6, 8 inches4, 5, 6, 8 inches
Standard wafer thickness200–1,000 µm150–1,000 µm
Throughput, up to400 wafers/hour200 wafers/hour
Footprint (W × D)430 × 650 mm650 × 650 mm
Frontside LED macro inspectionBasic bright-light inspection optionalGreen LED macro inspection
Backside Bernoulli inspectionNot stated as a SIL featureIncluded in manufacturer description
SECS/GEMOptionalOptional

Figures are from ASTEL's published product pages, which include legacy computer specifications. Final supplied configuration, compliance, software platform and model-level compatibility must be confirmed with ASTEL before quotation. Throughput figures are maxima, not guaranteed operating rates.

Microscope compatibility

ASTEL describes integration with semiconductor-inspection microscope families from Leica Microsystems, Nikon, Olympus/Evident and Zeiss. Original designs reference the Leica DM8000. Compatibility with a particular model, stage, wafer carrier and inspection workflow is subject to technical review and confirmation; the manufacturer does not establish universal plug-and-play compatibility for every microscope model.

Official demonstration videos

Videos are hosted by the manufacturer through its microscope loader video gallery. The second and third demonstrate related wafer-handling applications rather than a guaranteed feature/configuration of both models.

Brochures and manufacturer documentation

Official SIL8600 product specifications: Read manufacturer technical information.

Official MIL8000 product specifications: Read manufacturer technical information.

Manufacturer's loader overview: View product family and video gallery.

No model-specific public PDF brochure has yet been verified. Once current, manufacturer-approved PDF documents are available, the library can include direct hosted brochure downloads; installation manuals and internal technical materials should remain private.

Discuss an ASTEL wafer loader

With over 21 years' microscopy and wafer-sector experience, Michael at Auckland Scientific can advise on inspection requirements and discuss a suitable ASTEL configuration. All equipment is Price on Request.

Request a quotation

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